Maglev Pump , CXF-250/2301E , Water cooling , On board
The magnetically levitated molecular pumps are the pumps of which shafting is supported by virtue of magnetic force.
Series magnetically levitated molecular pumps are vacuum generation equipment developed by KYKY for meeting application requirements for fields of modern semiconductor manufacturing, chip manufacturing, industrial plating and scientific instruments.
Technologies:
- Control Technology for Magnetic Bearing: a 5-axis magnetically levitated, based on advanced international control theory, to guarantee such significant advantages of the high-speed shafting as stable levitated and reliable operation.
- Motor Drive Control Technology: High-efficiency high-speed DC motor and servo control system, haveing maximum energy of the motor and to compensate the rotating speed of shafting automatically, thereby realizing stable start-up, reliable operation and automatic regulating function of dynamic energy.
- Carbon fiber composite rotor technology: Made by compounding high-strength aluminum alloy and light-weight carbon fiber. characterized of great reduction of weight and great improvement of strength, so that targets of high rotating speed, high performance and high reliability are achieved.
- Corrosion resisting technology: Surfaces of parts in chambers are treated with special process, so that the surfaces can resist corrosion caused by corrosive gases in semiconductor manufacturing processes for a long time. In addition, inert gases such as N2 are fully filled in shafting of the pumps to protect the low vacuum parts in the pumps, so that function of stably exhausting corrosive gases for long periods is realized.
- Heating temperature control system: equipped with an electric heater and a temperature controller, cooling water, air-bone heating, electric heating and heat carried by protective gases can be monitored and controlled during operation, temperature in the pumps can be maintained at some value for long term, some gaseous substances are not converted into solid substances at normal temperature and not deposited in the pumps, and requirements for special process such of etching can be met.
Applications:
Series magnetically levitated molecular pumps are mainly applied to fields of semiconductor manufacturing, clip manufacturing, industrial plating and scientific instruments, especially to extraction of corrosive gases existing in etch, CVD, PVD and ion implantation and gases easily coagulated at normal temperature.
Specifications:
| Flange(In) |
DN250 CF/ISO-K, ISO-F |
| Flange(Out) KF |
DN40 |
| Pumping Speed( L/s) |
N2:2300 |
| Ar:2250 |
| He:1900 |
| H2:850 |
| Compression Ratio |
N2:108 |
| Ar:108 |
| He:104 |
| H2:103 |
| Ultimated Pressure(Pa) |
CF:1×10-6 |
| ISO-K/F:6×10-6 |
| Max. Continuous Fore-vacuum pressure(Pa) |
60 |
| Max. Fore-vacuum Pressure |
N2:250 |
| Gas Throughout (sccm) |
N2:3600 |
| Ar:1400 |
| He:2800 |
| H2:2100 |
| Rotation Speed ( rpm) |
27000 |
| Run-Up Time(min) |
≤11 |
| Cooling Type,Standard |
Water |
| Cooling Water Consumption ( L/min) |
1 |
| Cooling Water Temperature(℃) |
20 |
| Power Connection:Voltage (V AC) |
220 |
