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Ion Pump , 2L-200C , DN150CF , 220L/s Air , 2.4L/s Ar , +7KV
Sputter-ion pump is vacuum generation equipment for obtaining clean and ultra-high vacuum.The sputter-ion pump is main pump of oil less ultra-high vacuum set. The ion pump works in a closed system which doesn't require continuous working backing pump.
Advantages:
1. Cleanness
2. High vacuum degree
3. Zero noise
4. Zero vibration
5. Convenient to operate
Applications:
1. High-energy particle accelerator
2. Controlled thermonuclear reaction apparatus
3. Electric vacuum device
4. Semiconductor material
5. Electronic microscope
6. Mass spectrometer
Specifications:
|
Model |
2L-200C | |||
| Flange | DN150CF | |||
| Pumping speed(L/S) | ( air) | 220 | ||
| Pumping speed | (Ar) | 2.4 | ||
| Start-up pressure (Pa) | ≤5×10-4 | |||
| ultimate pressure (Pa) | 1×10-8 | |||
| (℃)baking temperature | ＜200 | |||
| With magnetic | ||||
| Without magnetic | ＜300 | |||
| working voltage(KV) | 7 | |||
| electrode unit | 4 | |||
| dimension(mm) | 200×140(4-M12) | |||
| L*W*H (mm) | 500×265×430 | |||
| (kg) weight | 100 | |||