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Ion Pump , 2L-50 , DN100CF , 65L/s Air , 0.6L/s Ar , +7KV
Sputter-ion pump is vacuum generation equipment for obtaining clean and ultra-high vacuum.
The sputter-ion pump is main pump of oil less ultra-high vacuum set.
The ion pump works in a closed system which doesn't require continuous working backing pump.
Advantages:
1. High vacuum degree
2. Zero vibration
3. Zero noise
4. Cleanness
5. Convenient to operate
Applications:
1. High-energy particle accelerator
2. Controlled thermonuclear reaction apparatus
3. Electric vacuum device
4. Semiconductor material
5. Electronic microscope
6. Mass spectrometer
Principle:
Material of anode is stainless steel barrel, and material of cathode istitanium plate. Penning discharge process ionizes gas under the joint action of magnetic field and electric field, thus realizing exhausting of gas.
Specifications:
| Model | 2L-50 | |||
| Flange | DN100CF | |||
| Pumping speed(L/S) | ( air) | 65 | ||
| Pumping speed | (Ar) | 0.6 | ||
| Start-up pressure (Pa) | ≤5×10-4 | |||
| ultimate pressure (Pa) | 7×10-8 | |||
| (℃)baking temperature | ＜200 | |||
| With magnetic | ||||
| Without magnetic | ＜300 | |||
| working voltage(KV) | 7 | |||
| electrode unit | 2 | |||
| dimension(mm) | 90×90(4-M6) | |||
| L*W*H (mm) | 290×120×299 | |||
| (kg) weight | 22 | |||