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Pump station FJ-700 , water cooling with Mechanical pump and Vacuum guages
FJ-700 E standard Turbo Molecular Pump Unit is an cleaning equipment to obtain high vacuum.
Such equipment is a vacuum obtaining system adopting the principle of vacuum, and consists of mechanical pump and molecular pump. It is featured by quick starting, high vacuum, few oil pollution, easy operation and etc and widely used in the fields of surface analysis, accelerator technology ,plasma technology, electric vacuum device manufacturing and other vacuum areas. The equipment is specifically composed of non-standard frame, mechanical pump and pipelines , electrical control systems, water cooling protection control and etc.
Main parameters:
Leaking rate of vacuum system: ≤ 1×10-9Pa·m3/S
Power supply voltage: 380V±10/50Hz
Cooling mode: water cooling (entering water temperature ≤ 25℃
Ambient temperature for equipment utilization: 5-40℃
Ambient humidity for equipment utilization: ≤ 80%
Configuration:
| Name | Number |
| F-160/700 molecular pump and power supply | 1 |
| RVP-6 mechanical pump | 1 |
| Frame | 1 |
| Control power supply | 1 |
| ZDF-11A2 combination vacuum gauge | 1 |
| Other attachments |
Features:
1.Quick starting
2.Easy operation
3.Water cooling protection
4.High vacuum
Specifications:
| Unit | FJ-700 | |
| Flange(In) | DN160 CF | |
| DN160 ISO-K | ||
| Flange(Out) | ISO-KF | DN40 |
| Pumping Speed | l/s | N2:700 |
| He:580 | ||
| H2:260 | ||
| Ar:680 | ||
| Compression Ratio | N2:109 | |
| He:107 | ||
| H2:106 | ||
| Ar:109 | ||
| Ultimate Pressure | Pa | CF:6×10-8 |
| ISO-K:6×10-7 | ||
| recommended forevacuum pressure | Pa | 100 |
| forevacuum pump | RVP-6( default ) | |
| Cooling Type,Standard | Water/Air | |
| Cooling Water Consumpion | L/min | >1 |
| Cooling Water Temperature | ℃ | ≤25 |
| Input voltage/ frequency | V/Hz | 380±20/50 |
| Environment temperature (℃) | Water cooling | 5℃-40℃ |
| mounting position | Vertical | |
| Controller Model | FD-ⅡB/TCDP-Ⅱ | |
| L*W*H | mm | 550×690×850(water) |
| Weight | kg | 135 |
Maintanence:
1. Routine maintenance:
During the daily use of the equipment, pay attention to observing the vacuum pump’s oil level and the pump oil color; if the oil is lacking, supply it in time. If the pump oil color is abnormal, change it in time.
2. Maintenance during the running:
During running of the equipment, pay attention to maintain the pumped vacuum chamber clean, so as to avoid the debris entering into the vacuum chamber and cause the damage of the equipment.