KYKY-EM8200 ultra-high resolution field emission scanning electron microscope with new electro-optical design. It is
based on the deceleration sample stage, a new generation of low aberration objective lens, Inlens detector and other
technologies, and integrates extensive image processing functions, which provides new solutions for users in new
energy, semiconductor and other industries.
Advantages:
Specifications:
| |
Configuration |
| Resolution |
0.8nm@15kV
|
|
1.5nm@1kV
|
| Magnification |
1x-3000000x
|
| Accelerating Voltage |
0.2kV-30kV
|
| Electron Gun |
Schottky field emission gun |
| Five Axes Eucentric Auto Stage |
X:0~150mm |
| Y:0~150mm |
| Z:0~65mm |
| R:360° |
| T:-10°～90° |
| Max Specimen |
320mm |
|
Maximum Sample Height
|
90mm
|
