KYKY TECHNOLOGY CO., LTD.
Innovating Scientific Instruments Developing into First-class Enterprises
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Advantages:
◆ Schottky field emission gun
◆ Multi-stage high performance lens system
◆ High beam stability
◆ Customizable extra-large sample chamber
◆ Simple operation
◆ Rich extensibility and high cost performance
Specifications:
| Item | EM8010 | |
| Resolution |
SE 1.5nm@15kV BSE 3nm@30kV
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| Magnification |
1x-600000x
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| Electron Gun | Schottky Field Emission Gun | |
| Accelerating Voltage |
0.2kV-30kV
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Vacuum System
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2 Ion Pumps, 1 Magnetic Levitation Turbo Molecular Pump, 1 Dry Pump
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| Objective Aperture | Molybdenum aperture adjustable outside vacuum system | |
| Specimen Stage | Five axes stage | |
| Travel | X(Auto) | 0 ~ 80mm |
| Range | Y(Auto) | 0 ~ 50mm |
| Z(Manual) | 0 ~ 30mm | |
| R(Manual) | 360° | |
| T(Manual) | -5° ~ 70° | |
| Max Specimen Diameter | 175mm | |
| Detector |
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| Modification | Stage Upgrade;EBL;STM;AFM;Heating Stage;Cryo Stage;Tensile Stage;Micro-nano manipulator;SEM+Coating Machine;SEM+Laser | |
| Accessories |
EDS/EBSD/STEM/CL/Heating Stage/Cooling Stage / Tensile Stage, etc.
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